Authors:Kiyotaka Wasa, Shigeru Haber,
Publisher: William Andrew
Keywords: technology, science, process, series, materials, principles, sputter, deposition, handbook, applications
Number of Pages: 316
Published: 1993-01-14
List price: $147.00
ISBN-10: 0815512805
ISBN-13: 9780815512806

A concise, comprehensive overview of sputter deposition technologyua key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

Authors:Diederik Depla, Diederik Depla, Stijn Mahieu,
Publisher: Springer
Keywords: materials, science, series, springer, sputter, deposition, reactive
Number of Pages: 572
Published: 2008-04-24
List price: $219.00
ISBN-10: 3540766626
ISBN-13: 9783540766629

The use of thin films is continuously expanding. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obta