Authors:Sergej Fatikow, Ulrich Rembold,
Publisher: Springer
Keywords: microrobotics, technology, microsystem
Number of Pages: 408
Published: 2002-02-12
List price: $119.00
ISBN-10: 3540606580
ISBN-13: 9783540606581

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development an

Author: Stephen D. Senturia
Publisher: Springer
Keywords: design, microsystem
Number of Pages: 720
Published: 2004-12-08
List price: $119.00
ISBN-10: 0792372468
ISBN-13: 9780792372462

The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today’s engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of `good design’ in the abstract, the book is organized around a set of Case Studies that are based on real products, or, where appropriately well-documented products could not be found, o

Authors:Wolfgang Menz, J?rgen Mohr, Oliver Paul,
Publisher: Wiley-VCH
Keywords: technology, microsystem
Number of Pages: 512
Published: 2001-02-15
List price: $300.00
ISBN-10: 3527296344
ISBN-13: 9783527296347

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

Authors:Oliver Geschke, Henning Klank, Pieter Telleman,
Publisher: Wiley-VCH
Keywords: multi, volume, comprehensive, treatise, biotechnology, devices, engineering, lab, chip, microsystem
Number of Pages: 270
Published: 2004-03-05
List price: $140.00
ISBN-10: 3527307338
ISBN-13: 9783527307333

Written on a non-specialist level by an interdisciplinary team of chemists, biologists and engineers from one of Europe’s leading centres for microsystem research, the Danish Mikroelektronik Centret (MIC), this is a concise practical introduction to the subject. As such, the book is the first to focus on analytical applications, providing life and analytical scientists, biotechnologists and pharmaceutists with an understanding of the principles behind the design and manufacture of chemical and biochemical microsystems. The text is backed by a chapter devoted to troubleshooting as wel

Authors:J. Walter Schultze, Tetsuya Osaka, Madhav Datta,
Publisher: CRC Press
Keywords: electrochemical, technology, trends, technologies, microsystem, new
Number of Pages: 576
Published: 2002-11
List price: $219.95
ISBN-10: 0415273552
ISBN-13: 9780415273558

This volume reviews the technological advances made in recent years in the development of microsystem technologies using electrochemical techniques. It covers the electrochemical microsystem technologies for microelectronics, sensors, materials science, microbiology, neurobiology and applications of microtechnologies and microsystems in medicine and provides an overview of the technical status and developments of micropatternings and micro-biosensors and the application of micropower systems. Electrochemical Microsystem Technologies will provide a valuable source of reference for both gradu