Author: Ville Kaajakari
Publisher: Small Gear Publishing
Keywords: mems, optical, microfluidic, systems, gyroscopes, accelerometers, design, microsystems, practical
Number of Pages: 496
Published: 2009-03-17
List price: $98.00
ISBN-10: 0982299109
ISBN-13: 9780982299104

Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include: Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks. Quantitative performance analysis. The critical performance parameters for the gi

Author: Ai-Qun Liu
Publisher: Springer
Keywords: mems, reference, shelf, circuits, switching, switches, integrated
Number of Pages: 300
Published: 2010-09-03
List price: $179.00
ISBN-10: 0387462619
ISBN-13: 9780387462615

RF MEMS switches and switching circuits are a new research field that focuses on developments in both micro RF switches and micromachined switching circuits. RF MEMS Switches and Integrated Switching Circuits builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits and presents a unified framework with new RF MEMS approaches spanning developments from RF MEMS switches to RF switching circuits and spanning scales from “MEMS switch component” to “MEMS switching c

Author: Peter J. Hesketh
Publisher: Springer
Keywords: mems, shelf, reference, bionanofluidic
Number of Pages: 295
Published: 2007-12-14
List price: $149.00
ISBN-10: 0387462813
ISBN-13: 9780387462813

BioNanoFluidic MEMS explains biosensor development fundamentals and initiates an awareness in engineers and scientists who would like to develop and implement novel biosensors for agriculture, biomedicine, home land security, environmental needs, and disease identification. In addition, the material covered in this book introduces and lays the basic foundation for design, fabrication, testing, and implemention of next generation biosensors through hands-on learning.

Authors:Reza Ghodssi, Pinyen Lin,
Publisher: Springer
Keywords: mems, shelf, reference, processes, materials, handbook
Number of Pages: 1224
Published: 2011-04-06
List price: $269.00
ISBN-10: 0387473165
ISBN-13: 9780387473161

Author: Jeffrey Lang
Publisher: Springer
Keywords: mems, engines, reference, shelf, generators, machines, wafer, rotating, multi, turbines
Number of Pages: 454
Published: 2009-09-30
List price: $169.00
ISBN-10: 0387777466
ISBN-13: 9780387777467

The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.

Authors:Cenk Acar, Andrei Shkel,
Publisher: Springer
Keywords: mems, robustness, reference, shelf, improve, approaches, vibratory, gyroscopes, structural
Number of Pages: 260
Published: 2008-10-23
List price: $129.00
ISBN-10: 0387095357
ISBN-13: 9780387095356

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods ar

Authors:Tamara Bechtold, Evgenii B. Rudnyi, Jan G. Korvink,
Publisher: Springer
Keywords: mems, compact, models, microtechnology, dynamic, efficient, electro, thermal, fast, simulation
Number of Pages: 180
Published: 2006-11-14
List price: $179.00
ISBN-10: 3540346120
ISBN-13: 9783540346128

Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. Emphasis is placed on the application of the Arnoldi method for effective order reduction of thermal systems. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.