Authors:Min-hang Bao, S. Middelhoek,
Publisher: Elsevier Science
Keywords: sensors, accelerometers, gyroscopes, handbook, actuators, pressure, mechanical, transducers, volume, micro
Number of Pages: 392
Published: 2000-10-30
List price: $254.00
ISBN-10: 044450558X
ISBN-13: 9780444505583

Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial a

Authors:Cenk Acar, Andrei Shkel,
Publisher: Springer
Keywords: mems, robustness, reference, shelf, improve, approaches, vibratory, gyroscopes, structural
Number of Pages: 260
Published: 2008-10-23
List price: $129.00
ISBN-10: 0387095357
ISBN-13: 9780387095356

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods ar

Author: Ville Kaajakari
Publisher: Small Gear Publishing
Keywords: mems, optical, microfluidic, systems, gyroscopes, accelerometers, design, microsystems, practical
Number of Pages: 496
Published: 2009-03-17
List price: $98.00
ISBN-10: 0982299109
ISBN-13: 9780982299104

Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include: Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks. Quantitative performance analysis. The critical performance parameters for the gi