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Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics; Proceedings: Internationa Symposium on Silicon Mitride and Silicon Dioxide Thin Insulating

Authors:R. E. Sah, et al
Publisher: Electrochemical Society
Keywords: silicon, dioxide, insulating, mitride, thin, symposium, proceedings, nitride, emerging, dielectrics, internationa
Number of Pages: 857
Published:
List price: $119.00
ISBN-10: 1566777100
ISBN-13: 9781566777100

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