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Silicon Nitride and Silicon Dioxide Thin Insulating Films VII: Proceedings of the International Symposium

Author:
Publisher: Electrochemical Society
Keywords: silicon, proceedings, international, symposium, vii, insulating, nitride, dioxide, thin, films
Number of Pages: 636
Published: 2003-01-01
List price: unknow
ISBN-10: 1566773474
ISBN-13: 9781566773478

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