• Home
  • Browser a Book
  • Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)

Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)

Authors:Kiyotaka Wasa, Shigeru Haber
Publisher: William Andrew
Keywords: technology, science, process, series, materials, principles, sputter, deposition, handbook, applications
Number of Pages: 316
Published: 1993-01-14
List price: $147.00
ISBN-10: 0815512805
ISBN-13: 9780815512806

Book Description:


A concise, comprehensive overview of sputter deposition technologyua key technology for materials research in the next decade.

Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.


Reviews:

Loading Google Book Reviews...

Related Books

Spread the word



Copyrights 2008,2009 ccebook - we introduce valuable English books. All rights reserved.
www.ccebook.net.Send emails to admin#ccebook.net for any concerns.