Dry Etching for VLSI

Authors:A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader
Publisher: Springer
Keywords: vlsi, etching, dry
Number of Pages: 237
Published: 1991-03-31
List price: $209.00
ISBN-10: 0306438356
ISBN-13: 9780306438356

Book Description:

This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing.


Reviews:

Loading Google Book Reviews...

Spread the word



Copyrights 2008,2009 ccebook - we introduce valuable English books. All rights reserved.
www.ccebook.net.Send emails to admin#ccebook.net for any concerns.